High-Precision Regulation of Nano-Grating Linewidth Based on ALD
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DOI: 10.3390/mi13070995
Abstract: A nano-grating standard with accurate linewidth can not only calibrate the magnification of nano-measurement instruments, but can also enable comparison of linewidths. Unfortunately, it is still a challenging task to control the linewidth of nano-grating… read more here.
Keywords: high precision; nano grating; linewidth; pitch ... See more keywords