Porous Silicon Fabrication and Surface Cracking Behavior Research Based on Anodic Electrochemical Etching ▴
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DOI: 10.1002/fuce.202000048
Abstract: Porous silicon (PSi) was fabricated based on anodic electrochemical etching, and the relationship between preparation conditions, nanostructure and PSi surface crack behavior were systematically studied. The effects of silicon wafer resistivity (doping concentration), etching time,… read more here.
Keywords: based anodic; geometry; surface; anodic electrochemical ... See more keywords