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Published in 2020 at "Semiconductors"
DOI: 10.1134/s1063782620060093
Abstract: Resistive-type structures based on gallium-oxide films are studied. The Ga2O3 films are produced by radio-frequency magnetron-assisted sputtering of a β-Ga2O3 (99.9999%) target onto unheated sapphire substrates with preliminarily deposited platinum electrodes. The data on the…
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Keywords:
detectors based;
blind detectors;
ga2o3 films;
solar blind ... See more keywords