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Published in 2021 at "Measurement"
DOI: 10.1016/j.measurement.2021.109738
Abstract: Abstract There is urgent demand for new absolute Linear Displacement Measurement (LDM) technology with high resolution and high precision, during the development of high-end numerical control technology. In previous research, we found that displacement measurement…
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Keywords:
linear displacement;
measurement based;
absolute linear;
based grating ... See more keywords
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Published in 2025 at "IEEE Sensors Journal"
DOI: 10.1109/jsen.2024.3507084
Abstract: Sensors based on optical interferometric displacement measurement have the outstanding advantage of high sensitivity and are widely applied in various measurement fields. In particular, with the development of micro-opto-electromechanical system technology, grating-interferometer-based sensors have drawn…
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Keywords:
micro sensor;
grating interferometer;
based grating;
integrated micro ... See more keywords
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Published in 2022 at "IEEE Transactions on Instrumentation and Measurement"
DOI: 10.1109/tim.2022.3208649
Abstract: It is difficult to realize cleaned surface monitoring in the process of laser cleaning. Here, a new method is developed based on the grating diffraction principle. Grating-like structures will be on the laser-cleaned surface as…
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Keywords:
laser cleaning;
testing method;
situ testing;
based grating ... See more keywords
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Published in 2017 at "Optics express"
DOI: 10.1364/oe.25.016484
Abstract: Research thrusts in silicon photonics are developing control operations using higher order waveguide modes for next generation high-bandwidth communication systems. In this context, devices allowing optical processing of multiple waveguide modes can reduce architecture complexity…
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Keywords:
resonators based;
based grating;
multimode resonators;
hybrid multimode ... See more keywords
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Published in 2022 at "Optics express"
DOI: 10.1364/oe.475830
Abstract: We propose a 3D measurement method based on 2D grating dual-channel and Littrow equal-optical path incidence to detect the 3D displacement of a 2D grating in the X-, Y-, and Z-directions. The 2D grating is…
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Keywords:
equal optical;
channel;
grating dual;
optical path ... See more keywords