Data-Driven Iterative Feedforward Tuning for a Wafer Stage: A High-Order Approach Based on Instrumental Variables
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DOI: 10.1109/tie.2018.2842756
Abstract: The feedforward controller plays an important role in the achievement of high servo performance of wafer scanning. In this paper, a novel data-driven feedforward tuning method is developed in the presence of noise. Three distinguished… read more here.
Keywords: based instrumental; iterative feedforward; instrumental variables; feedforward tuning ... See more keywords