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Published in 2019 at "Journal of Micromechanics and Microengineering"
DOI: 10.1088/1361-6439/ab078f
Abstract: An impedance-based interdigitated biochemical sensor is presented in this work that is designed for, and fabricated using a standard polycrystalline silicon process. The sensor provides a near real time, non-invasive, label free and rapid detection…
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Keywords:
impedance based;
based interdigitated;
circuit;
sensor ... See more keywords