Fabrication of sub-100 nm h-PDMS tip array for tip-based nanolithography by electrochemical machining
Sign Up to like & getrecommendations! Published in 2017 at "Microsystem Technologies"
DOI: 10.1007/s00542-016-2883-6
Abstract: Tip-based nanolithography provides a flexible nano-lithographic technology. The tip fabrication is the main challenge of the technology. The combination of reactive ion etch and electrochemical machining provides a cost-efficient method for tip fabrication with nanoscale… read more here.
Keywords: array; tip based; fabrication; based nanolithography ... See more keywords
Pile-Ups Formation in AFM-Based Nanolithography: Morpho-Mechanical Characterization and Removal Strategies
Sign Up to like & getrecommendations! Published in 2022 at "Micromachines"
DOI: 10.3390/mi13111982
Abstract: In recent decades, great efforts have been made to develop innovative, effective, and accurate nanofabrication techniques stimulated by the growing demand for nanostructures. Nowadays, mechanical tip-based emerged as the most promising nanolithography technique, allowing the… read more here.
Keywords: formation afm; ups formation; afm based; pile ups ... See more keywords