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1
Published in 2017 at "Journal of Applied Physics"
DOI: 10.1063/1.4990407
Abstract: Low-resistance and thermally stable Ohmic contacts are essential for radio frequency switches based on the unique phase change properties of GeTe. Herein, Mo-based Ohmic contacts to p-type GeTe are reported, including the effect of pre-metallization…
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Keywords:
contact resistance;
resistance based;
low resistance;
ohmic contacts ... See more keywords
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Published in 2018 at "Semiconductor Science and Technology"
DOI: 10.1088/1361-6641/aac3c3
Abstract: To obtain Ti/Al-based ohmic contacts on AlGaN/GaN heterostructures with a low resistance, it is crucial to understand their formation mechanism. Such a mechanism is still unclear, especially when the annealing temperature is as low as…
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Keywords:
formation mechanism;
temperature;
mechanism;
algan gan ... See more keywords
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2
Published in 2023 at "Semiconductor Science and Technology"
DOI: 10.1088/1361-6641/acda56
Abstract: Ti/TiN/Cu is established to be an enabling alternative to the better-known Au-based ohmic contact metals such as Ti/Al/Ni/Au. The Cu-based option delivers lower contact resistance and smoother surface morphology and is proven to be compatible…
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Keywords:
based ohmic;
algan gan;
contact;
layer ... See more keywords
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0
Published in 2019 at "Semiconductors"
DOI: 10.1134/s1063782619020064
Abstract: The formation features of a low-temperature Ta/Al-based ohmic contact to Al0.25Ga0.75N/GaN heteroepitaxial structures on silicon substrates are studied. The fabricated ohmic contacts based on Ta/Al/Ti (10/300/20 nm) compositions have a low contact resistance (0.4 Ω…
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Keywords:
low temperature;
heteroepitaxial structures;
temperature based;
structures silicon ... See more keywords