A MEMS-Based Co-Oscillating Electrochemical Vector Hydrophone
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DOI: 10.3390/mi13010143
Abstract: Aiming at the development needs of low-frequency and high-sensitivity vector hydrophones, this paper has developed a micro-electro-mechanical system (MEMS) based co-oscillating electrochemical vector hydrophone. We obtained the optimized geometric parameters through simulation analysis of the… read more here.
Keywords: vector hydrophone; oscillating electrochemical; based oscillating; vector ... See more keywords