High-K metal gate stacks with ultra-thin interfacial layers formed by low temperature microwave-based plasma oxidation
Sign Up to like & getrecommendations! Published in 2017 at "Microelectronic Engineering"
DOI: 10.1016/j.mee.2017.05.041
Abstract: Abstract Ultra-thin interfacial silicon oxide layers are grown by microwave-based plasma oxidation at temperatures below 200 °C. The influence of plasma gas composition and plasma pulsing on layer properties is tested. The oxides are compared to… read more here.
Keywords: ultra thin; high metal; microwave based; plasma oxidation ... See more keywords
Deep etched and released microstructures in Zerodur in a fluorine-based plasma
Sign Up to like & getrecommendations! Published in 2018 at "Microelectronic Engineering"
DOI: 10.1016/j.mee.2018.07.004
Abstract: Abstract In this paper, we demonstrate the dry-etch release of free-standing mechanical elements with a high aspect ratio from a Zerodur wafer. Our previous research was focussed on deep plasma etching of Zerodur and the… read more here.
Keywords: deep etched; etched released; fluorine based; process ... See more keywords
PSXII-2 DI/LC-MS/MS-based plasma metabolomics reveals the effects of sequestering agents on the metabolic status of dairy cows challenged with dietary aflatoxin B1
Sign Up to like & getrecommendations! Published in 2019 at "Journal of Animal Science"
DOI: 10.1093/jas/skz258.822
Abstract: The study applied a targeted quantitative metabolomics approach using a combination of direct injection and tandem mass spectrometry (DI-MS/MS) with a liquid chromatography-tandem mass spectrometry (LC-MS/MS)-based plasma metabolomics to evaluate the effects of supplementing clay… read more here.
Keywords: cows challenged; dairy cows; based plasma; aflatoxin ... See more keywords
Design of an ultra-broadband absorber based on plasma metamaterial and lumped resistors
Sign Up to like & getrecommendations! Published in 2018 at "Optical Materials Express"
DOI: 10.1364/ome.8.002103
Abstract: An electromagnetic absorber is realized based on the plasma metamaterial and lumped resistors. For a TE wave, the tunable absorption spectra can be obtained, and the properties of absorption can be improved by exciting the… read more here.
Keywords: plasma metamaterial; ultra broadband; absorber; metamaterial lumped ... See more keywords
The Method of Low-Temperature ICP Etching of InP/InGaAsP Heterostructures in Cl2-Based Plasma for Integrated Optics Applications
Sign Up to like & getrecommendations! Published in 2021 at "Micromachines"
DOI: 10.3390/mi12121535
Abstract: Chlorine processes are widely used for the formation of waveguide structures in InP-based optoelectronics. Traditionally, ICP etching of InP in a Cl2-based plasma requires substrate temperatures in the range of 150–200 °C. This condition is… read more here.
Keywords: icp etching; optics; inp ingaasp; based plasma ... See more keywords
UPLC-Q-TOF/MS Based Plasma Metabolomics for Identification of Paeonol’s Metabolic Target in Endometriosis
Sign Up to like & getrecommendations! Published in 2023 at "Molecules"
DOI: 10.3390/molecules28020653
Abstract: Endometriosis is a common gynecological illness in women of reproductive age that significantly decreases life quality and fertility. Paeonol has been shown to play an important part in endometriosis treatments. Understanding the mechanism is critical… read more here.
Keywords: uplc tof; plasma metabolomics; based plasma; endometriosis ... See more keywords