Miniaturized CO2 Gas Sensor Using 20% ScAlN-Based Pyroelectric Detector
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DOI: 10.1021/acssensors.2c00980
Abstract: NDIR CO2 gas sensors using a 10-cm-long gas channel and CMOS-compatible 12% doped ScAlN pyroelectric detector have previously demonstrated detection limits down to 25 ppm and fast response time of ∼2 s. Here, we increase… read more here.
Keywords: pyroelectric detector; gas; co2 gas; based pyroelectric ... See more keywords