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Published in 2018 at "Journal of Process Control"
DOI: 10.1016/j.jprocont.2018.07.006
Abstract: Abstract The key issue in semiconductor rapid thermal processing (RTP), where silicon wafers are heated to desired temperatures, is to ensure uniform wafer temperature profiles. This in turn guarantees that the manufactured integrated circuits (IC),…
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Keywords:
temperature;
control;
wafer;
observer based ... See more keywords
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Published in 2020 at "Chemistry of Materials"
DOI: 10.1021/acs.chemmater.0c01589
Abstract: To balance the requirements of transparency, mechanical strength, stable conductivity and biocompatibility of traditional electronic conductive hydrogels in intelligent devices is still a formidabl...
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Keywords:
linked ion;
ion based;
conductive hydrogels;
cross linked ... See more keywords
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Published in 2018 at "Journal of Applied Physics"
DOI: 10.1063/1.5024818
Abstract: We herein propose a far-field super-resolution imaging with metal thin films based on the temperature-dependent electron–phonon collision frequency effect. In the proposed method, neither fluorescence labeling nor any special properties are required for the samples.…
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Keywords:
resolution;
resolution imaging;
thin films;
metal thin ... See more keywords
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Published in 2021 at "Sensor Review"
DOI: 10.1108/sr-01-2021-0023
Abstract: Purpose This study aims to present an efficient and reliable graphene nanoplatelets (GNPs)-based temperature sensor. Design/methodology/approach A high-quality dispersion of GNPs was dropped by casting method on platinum electrodes deposited on a polyethylene terephthalate (PET)…
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Keywords:
graphene nanoplatelets;
temperature sensor;
based temperature;
temperature ... See more keywords
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Published in 2019 at "IEEE Photonics Technology Letters"
DOI: 10.1109/lpt.2019.2913992
Abstract: This letter proposes an alternative approach to the signal processing of temperature measurements based on fiber Bragg gratings (FBGs) using the machine learning tool Gaussian process regression (GPR). The experimental results show that for a…
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Keywords:
fiber bragg;
based temperature;
temperature;
machine learning ... See more keywords