Enhancing Optical Forces in InP-Based Waveguides
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DOI: 10.1038/s41598-017-03409-1
Abstract: Cantilever sensors are among the most important microelectromechanical systems (MEMS), which are usually actuated by electrostatic forces or piezoelectric elements. Although well-developed microfabrication technology has made silicon the prevailing material for MEMS, unique properties of… read more here.
Keywords: based waveguides; enhancing optical; optical forces; inp based ... See more keywords