Tensile strength of Silicon Nanowires batch-fabricated into electrostatic MEMS testing device
Sign Up to like & getrecommendations! Published in 2018 at "Applied Sciences"
DOI: 10.3390/app8060880
Abstract: The tensile strength of a silicon nanowire (SiNW) that had been integrated into a silicon-on-insulator (SOI)-based microelectromechanical system (MEMS) device was measured using electrostatic actuation and sensing. SiNWs of about 150 nm diameter and 5… read more here.
Keywords: tensile strength; batch fabricated; strength silicon; silicon ... See more keywords
Batch-Fabricated α-Si Assisted Nanogap Tunneling Junctions
Sign Up to like & getrecommendations! Published in 2019 at "Nanomaterials"
DOI: 10.3390/nano9050727
Abstract: This paper details the design, fabrication, and characterization of highly uniform batch-fabricated sidewall etched vertical nanogap tunneling junctions for bio-sensing applications. The device consists of two vertically stacked gold electrodes separated by a partially etched… read more here.
Keywords: spacer; nanogap tunneling; batch fabricated; fabricated assisted ... See more keywords