1 and 2-DoF AlN-on-SOI BAW Disk MEMS Resonant Sensors Operated at Contour Mode
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DOI: 10.1109/jsen.2024.3402101
Abstract: This article conducts a comprehensive study on 1 and 2-degree-of-freedom (DoF) piezoelectric bulk acoustic wave (BAW) disk resonators operating in the contour extensional mode as mass sensors. Laser bombardment was utilized to remove well-defined quantities… read more here.
Keywords: mode; baw disk; mass; dof ... See more keywords