Sign Up to like & get
recommendations!
0
Published in 2018 at "Procedia Manufacturing"
DOI: 10.1016/j.promfg.2018.03.080
Abstract: Abstract The technology is growing very rapidly, and the micro scale devices are playing a very important role in the electronic, mechanical and other application areas due to their integrability with CMOS IC technology, low…
read more here.
Keywords:
eigenfrequency;
analysis;
baw;
baw resonators ... See more keywords