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Published in 2018 at "Procedia Manufacturing"
DOI: 10.1016/j.promfg.2018.03.080
Abstract: Abstract The technology is growing very rapidly, and the micro scale devices are playing a very important role in the electronic, mechanical and other application areas due to their integrability with CMOS IC technology, low…
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Keywords:
eigenfrequency;
analysis;
baw;
baw resonators ... See more keywords
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Published in 2025 at "IEEE Transactions on Electron Devices"
DOI: 10.1109/ted.2025.3526120
Abstract: This article reports a gallium nitride (GaN)-based switchable bulk acoustic wave (BAW) resonator with low dc switching voltage and through GaN vias. The low switching voltages between “on” and “off” states are enabled by the…
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Keywords:
high switchable;
switchable baw;
gan vias;
switching voltages ... See more keywords