BBr3 diffusion with second deposition for laser-doped selective emitters from borosilicate glass
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DOI: 10.1016/j.solmat.2018.06.042
Abstract: Abstract We study a boron tribromide (BBr3) diffusion process with second deposition realized by active nitrogen flow through the BBr3 bubbler at the end of the process with respect to laser doping. Compared to the… read more here.
Keywords: second deposition; deposition; laser doped; bbr3 diffusion ... See more keywords