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Published in 2021 at "ACS Omega"
DOI: 10.1021/acsomega.1c01488
Abstract: Polymeric materials with a low dielectric constant are widely used in the electronic industry due to their properties. In particular, polymer adhesives can be used in many applications such as wafer bonding and three-dimensional integration.…
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Keywords:
complex patterns;
based polymer;
bcb based;
benzocyclobutene ... See more keywords