Degenerate and non-degenerate In2O3 thin films by pulsed electron beam deposition
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DOI: 10.1016/j.mssp.2018.07.024
Abstract: Abstract Pulsed electron beam deposition (PED) was used to grow indium oxide thin films on c-cut sapphire single crystalline substrates between room temperature and 500 °C under oxygen gas. A slight difference in oxygen pressure during… read more here.
Keywords: non degenerate; thin films; pulsed electron; degenerate ... See more keywords