Electron Bessel beam diffraction for precise and accurate nanoscale strain mapping
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DOI: 10.1063/1.5096245
Abstract: Strain has a strong effect on the properties of materials and the performance of electronic devices. Their ever shrinking size translates into a constant demand for accurate and precise measurement methods with very high spatial… read more here.
Keywords: strain; bessel beam; beam diffraction; electron bessel ... See more keywords