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Published in 2020 at "Optics Communications"
DOI: 10.1016/j.optcom.2019.125139
Abstract: Abstract A single collimating lens based dual-beam exposure system is proposed in this paper in which two interference beams share one collimating lens. Based on theoretical analysis and simulation, the interference aberration caused by the…
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Keywords:
system;
collimating lens;
exposure;
lens based ... See more keywords