Research on processing technology of beam membrane structure based on porous silicon
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DOI: 10.1142/s0217984919500921
Abstract: Aiming at the problem of poor reliability of beam membrane fabrication in silicon microstructure processing technology, a technique for preparing microbeams using porous silicon sacrificial layer is proposed. The comparison of different porosity, different depths… read more here.
Keywords: processing technology; porous silicon; beam; beam membrane ... See more keywords