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Published in 2022 at "Small"
DOI: 10.1002/smll.202105998
Abstract: A cantilever-free scanning probe lithography (CF-SPL)-based method for the rapid polymerization of nanoscale features on a surface via crosslinking and thiol-acrylate photoreactions is described, wherein the nanoscale position, height, and diameter of each feature can be finely and independently tuned.…
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Keywords:
protein;
beam pen;
lithography;
pen lithography ... See more keywords
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Published in 2017 at "ACS nano"
DOI: 10.1021/acsnano.7b03282
Abstract: A high-throughput, solution-based, scanning-probe photochemical nanopatterning approach, which does not require the use of probes with subwavelength apertures, is reported. Specifically, pyramid arrays made from high-refractive-index polymeric materials were constructed and studied as patterning tools…
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Keywords:
photochemical nanopatterning;
phase;
high refractive;
beam pen ... See more keywords
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Published in 2017 at "Optical Engineering"
DOI: 10.1117/1.oe.56.11.115104
Abstract: Abstract. A beam pen lithography system is proposed for ultraviolet (UV) patterning of complicated patterns in a maskless manner. The system consists of a single UV light-emitting diode (LED), a double-sided microlens/spatial-filter array (MLSFA), and…
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Keywords:
array;
pen lithography;
beam pen;