Fabrication of clamped-clamped beam resonators with embedded fluidic nanochannel
Sign Up to like & getrecommendations! Published in 2020 at "Microelectronic Engineering"
DOI: 10.1016/j.mee.2020.111395
Abstract: Abstract Suspended nanochannel resonators (SNRs) are promising devices able to characterize mass down to the attogram scale, thus being able to detect nanoparticles or biomolecules. In this paper, we present a flexible fabrication process for… read more here.
Keywords: fabrication clamped; fabrication; clamped clamped; clamped beam ... See more keywords
Effect of buckling on the thermal response of microelectromechanical beam resonators
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DOI: 10.1063/1.4993740
Abstract: We have investigated the thermal response of the doubly clamped microelectromechanical (MEMS) beam resonators as a function of an input heating power. When a small amount of heat ( read more here.
Keywords: thermal response; frequency; beam resonators; mems beam ... See more keywords
Theoretical study of platonic crystals with periodically structured N-beam resonators
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DOI: 10.1063/1.5009170
Abstract: A multiple scattering theory is applied to study the properties of flexural waves propagating in a plate with periodically structured N-beam resonators. Each resonator consists of a circular hole containing an inner disk connected to… read more here.
Keywords: theoretical study; structured beam; periodically structured; beam resonators ... See more keywords