Articles with "beam sputtering" as a keyword



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Effect of Ar+ beam sputtering on the magnetic anisotropy of Fe thin films deposited on the MgO(0 0 1) substrate

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Published in 2017 at "Results in physics"

DOI: 10.1016/j.rinp.2017.04.021

Abstract: Abstract The Fe thin films with different initial thickness were prepared on MgO(0 0 1) substrate. Ar + ion beam having energy of 3 keV was used to sputter the film at incident angle of 80° with respect… read more here.

Keywords: beam sputtering; thin films; mgo substrate; magnetic anisotropy ... See more keywords
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Formation of nanoripples on amorphous alumina thin films during low-energy ion-beam sputtering: Experiments and simulations

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Published in 2017 at "Physical Review B"

DOI: 10.1103/physrevb.95.085412

Abstract: The formation of nanopatterns induced by low-energy (0.5--1.5 keV) ${\mathrm{Xe}}^{+}$ ion-beam sputtering of amorphous alumina thin films is investigated by atomic force microscopy and grazing incidence small-angle x-ray scattering. The observed dependence of the surface… read more here.

Keywords: beam sputtering; energy; ion beam; amorphous alumina ... See more keywords
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Magnetoelastic Waves in Submicron Yttrium–Iron Garnet Films Manufactured by Means of Ion-Beam Sputtering onto Gadolinium–Gallium Garnet Substrates

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Published in 2018 at "Technical Physics"

DOI: 10.1134/s1063784218070162

Abstract: A series of equidistant oscillations have been revealed in the transmission spectrum and dispersion law of Damon–Eshbach surface magnetostatic waves (SMSWs) propagating in submicron (200-nm) yttrium–iron garnet (YIG) films manufactured by means of ion-beam sputtering… read more here.

Keywords: beam sputtering; ion beam; yttrium iron; garnet ... See more keywords
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Combinatorial Study of Phase Composition, Microstructure and Mechanical Behavior of Co-Cr-Fe-Ni Nanocrystalline Film Processed by Multiple-Beam-Sputtering Physical Vapor Deposition

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Published in 2022 at "Materials"

DOI: 10.3390/ma15062319

Abstract: A combinatorial Co-Cr-Fe-Ni compositional complex alloy (CCA) thin film disk with a thickness of 1 µm and a diameter of 10 cm was processed by multiple-beam-sputtering physical vapor deposition (PVD) using four pure metal sources.… read more here.

Keywords: multiple beam; composition; film; beam sputtering ... See more keywords