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Published in 2017 at "Journal of Applied Physics"
DOI: 10.1063/1.4982762
Abstract: Here, we investigate the dynamical sensitivity of electrostatic torsional type microelectromechanical systems (MEMS) on the optical properties of interacting materials. This is accomplished by considering the combined effect of mechanical Casimir and electrostatic torques to…
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Keywords:
optical properties;
casimir;
sensitivity;
beam torsional ... See more keywords