Hardening, Softening, and Linear Behavior of Elastic Beams in MEMS: An Analytical Approach
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DOI: 10.1109/jmems.2019.2892296
Abstract: This paper investigates different topologies of springs used to couple the orthogonal translational motion of proof masses in Micro-Electro-Mechanical Systems (MEMS). This type of coupling is a key issue, since the dynamic response, and hence,… read more here.
Keywords: elastic beams; beams mems; behavior elastic; hardening softening ... See more keywords