Investigations of the Effects of Geometric Imperfections on the Nonlinear Static and Dynamic Behavior of Capacitive Micomachined Ultrasonic Transducers
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DOI: 10.3390/mi9110575
Abstract: In order to investigate the effects of geometric imperfections on the static and dynamic behavior of capacitive micomachined ultrasonic transducers (CMUTs), the governing equations of motion of a circular microplate with initial defection have been… read more here.
Keywords: static dynamic; geometric imperfections; behavior; behavior capacitive ... See more keywords