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Published in 2017 at "Journal of Alloys and Compounds"
DOI: 10.1016/j.jallcom.2017.02.117
Abstract: Abstract In this work, a thin film SiGe was synthesized by the solid source Molecular Beam Epitaxy and identified by X-ray diffractometry and Raman spectroscopy. The effect of the Ge fraction on the structural, electrical…
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Keywords:
conductivity dielectric;
thin films;
behavior si1;
molecular beam ... See more keywords