Microstructure and nanomechanical behavior of sputtered CuNb thin films
Sign Up to like & getrecommendations! Published in 2021 at "Intermetallics"
DOI: 10.1016/j.intermet.2021.107249
Abstract: Abstract We report on the mechanical properties of Cu–Nb alloys produced by combinatorial magnetron sputtering. Depending on the composition, the microstructure is either fully amorphous (~30–65 at.% Cu), a dispersion of Cu crystallites in an amorphous… read more here.
Keywords: behavior sputtered; thin films; microstructure nanomechanical; nanomechanical behavior ... See more keywords
Oxidation and wet etching behavior of sputtered Mo-Ti-Al films
Sign Up to like & getrecommendations! Published in 2018 at "Journal of Vacuum Science and Technology"
DOI: 10.1116/1.5009289
Abstract: Exposure of Mo thin films above 300 °C in ambient atmosphere results in surface oxidation, leading to the formation of colored oxide films deteriorating their performance in thin film transistor liquid crystal displays. In this study,… read more here.
Keywords: wet etching; behavior sputtered; oxidation wet; etching behavior ... See more keywords