Mechanical Properties and Oxidation Behavior of TaWSiN Films
Sign Up to like & getrecommendations! Published in 2022 at "Materials"
DOI: 10.3390/ma15228179
Abstract: This study explored the structural characteristics, mechanical properties, and oxidation behavior of W-enriched TaWSiN films prepared through co-sputtering. The atomic ratios [W/(W + Ta)] of the as-deposited films maintained a range of 0.77–0.81. The TaWSiN… read more here.
Keywords: properties oxidation; tawsin films; behavior tawsin; tawsin ... See more keywords