Influence of sputtered species ionisation on the hysteresis behaviour of reactive HiPIMS with oxygen admixture
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DOI: 10.1088/1361-6595/ab5f2b
Abstract: In this paper, the hysteresis behaviour of reactive magnetron sputtering process with oxygen admixture is studied by both experiment and model. The ground state number densities of titanium atoms and ions, and the deposition rates… read more here.
Keywords: hysteresis behaviour; hysteresis; ionisation; behaviour reactive ... See more keywords