Design and Simulation of MEMS-Based Digital-to-Analog Converters for In-Plane Actuation
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DOI: 10.1007/s13369-017-2544-9
Abstract: A microelectromechanical system-based digital-to-analog converter (MEMS DAC) using a bent beam electrothermal compliant actuator as a single mechanical bit is proposed in this work. Two types of MEMS DAC namely asymmetric and symmetric structures with… read more here.
Keywords: based digital; design; bent beam; simulation ... See more keywords