A Bent-TBTF Resonant MEMS Accelerometer Using Auxiliary Supporting Beams
Sign Up to like & getrecommendations! Published in 2024 at "IEEE Electron Device Letters"
DOI: 10.1109/led.2024.3453324
Abstract: This letter demonstrates a high-responsivity piezoelectric resonant MEMS accelerometer using a bent-TBTF resonator. Different from the conventional bent-beam resonant accelerometers, the proposed device uses two auxiliary supporting beams that can be designed to control the… read more here.
Keywords: supporting beams; resonant mems; bent tbtf; auxiliary supporting ... See more keywords