Wide range detector of plasma induced charging effect for advanced CMOS BEOL processes
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DOI: 10.1186/s11671-021-03570-7
Abstract: This work proposed a modified plasma induced charging (PID) detector to widen the detection range, for monitoring the possible plasma damage across a wafer during advanced CMOS BEOL processes. New antenna designs for plasma induced… read more here.
Keywords: beol processes; plasma; plasma induced; advanced cmos ... See more keywords