PROBE: A Placement, Routing, Back-End-of-Line Measurement Utility
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DOI: 10.1109/tcad.2017.2750072
Abstract: In advanced technology nodes, correctly choosing among available back-end-of-line (BEOL) stack options is important to meet stringent design quality of results requirements. However, it is nontrivial to evaluate BEOL stack options since the routing outcomes… read more here.
Keywords: back end; end line; beol stack; design ... See more keywords