Radius and angle determination of diamond Berkovich indenter
Sign Up to like & getrecommendations! Published in 2017 at "Measurement"
DOI: 10.1016/j.measurement.2017.03.035
Abstract: Abstract In this work, a new measurement method based on atomic force microscope (AFM) and confocal laser scanning microscope (CLSM) is proposed to determine the radius and angle parameters of diamond Berkovich indenter. In order… read more here.
Keywords: indenter; radius; determination; radius angle ... See more keywords
Investigation on residual scratch depth and material removal rate of scratching machining single crystal silicon with Berkovich indenter
Sign Up to like & getrecommendations! Published in 2019 at "Materials Science in Semiconductor Processing"
DOI: 10.1016/j.mssp.2019.04.037
Abstract: Abstract Single crystal silicon is the basic material for the fabrication of micro-devices and micro-structures. It exhibits plastic behavior in micro/nano-machining. The key to obtain high-quality machined surfaces in ultra-precision machining of brittle materials is… read more here.
Keywords: scratching machining; single crystal; crystal silicon; material removal ... See more keywords