A Hybrid RF MEMS Switch Actuated by the Combination of Bidirectional Thermal Actuations and Electrostatic Holding
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DOI: 10.1109/tmtt.2020.3003553
Abstract: Radio frequency microelectro-mechanical system (RF MEMS) switches have received attention due to their higher performances at high frequencies compared with semiconductor-based switches. However, most of the previous MEMS switches used electrostatic actuation, which requires a… read more here.
Keywords: actuation; bidirectional thermal; electrostatic holding; hybrid mems ... See more keywords