Estimation of the Young’s Modulus of Nanometer-Thick Films Using Residual Stress-Driven Bilayer Cantilevers
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DOI: 10.3390/nano12020265
Abstract: Precise prediction of mechanical behavior of thin films at the nanoscale requires techniques that consider size effects and fabrication-related issues. Here, we propose a test methodology to estimate the Young’s modulus of nanometer-thick films using… read more here.
Keywords: stress; young modulus; methodology; modulus nanometer ... See more keywords