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Published in 2017 at "Micromachines"
DOI: 10.3390/mi8070220
Abstract: A piezoelectric bimorph beam, as an upgraded cantilever beam structure, can be used to detect gas content and build a micro-actuator, among other functions. Thus, this beam is widely applied to microelectromechanical systems (MEMS), transformers,…
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Keywords:
beam;
spectroscopy;
bimorph beam;
piezoelectric bimorph ... See more keywords