Bioconcentration potential and microbial toxicity of onium cations in photoacid generators
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DOI: 10.1007/s11356-020-12250-5
Abstract: Despite the widespread utilization of onium salts as photoacid generators (PAGs) in semiconductor photolithography, their environmental, health, and safety (EHS) properties remain poorly understood. The present work reports the bioconcentration potential of five representative onium… read more here.
Keywords: potential microbial; onium; photoacid generators; bioconcentration potential ... See more keywords