Fabrication, calibration, and preliminary testing of microcantilever-based piezoresistive sensor for BioMEMS applications.
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DOI: 10.1049/iet-nbt.2019.0277
Abstract: In this study, the authors demonstrate the fabrication, calibration, and testing of a piezoresistive microcantilever-based sensor for biomedical microelectromechanical system (BioMEMS) application. To use any sensor in BioMEMS application requires surface modification to capture the… read more here.
Keywords: biomems applications; microcantilever based; sensor; fabrication calibration ... See more keywords