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Published in 2021 at "Materials"
DOI: 10.3390/ma14216462
Abstract: In the past few decades, ZrN thin films have been identified as wear resistant coatings for tribological applications. The mechanical and tribological properties of ZrN thin layers depend on internal stress induced by the adopted…
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Keywords:
magnetron sputtering;
bipolar pulsed;
residual stress;
stress ... See more keywords
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Published in 2017 at "Journal of The Korean Ceramic Society"
DOI: 10.4191/kcers.2017.54.1.02
Abstract: Single phase niobium nitride (NbN) coatings were deposited using asymmetric bipolar pulsed dc sputtering by varying pulse frequency and duty cycle of pulsed plasmas. Crystal structure, microstructure, morphology and mechanical properties were examined using XRD,…
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Keywords:
asymmetric bipolar;
bipolar pulsed;
coatings deposited;
structure ... See more keywords