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Published in 2019 at "Journal of Microelectromechanical Systems"
DOI: 10.1109/jmems.2019.2904997
Abstract: An improved design of an electrothermally actuated two-terminal bistable microswitch is the focus of this paper. The proposed design has bimodal bistability which is obtained by using a pair of arches, a V-beam electrothermal actuator,…
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Keywords:
microswitch;
two terminal;
terminal bistable;
bistable electrothermally ... See more keywords