LAUSR

BITAVOX coatings obtained by reactive magnetron sputtering: Influence of thickness and composition

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1 Published in 2017 at "Solid State Ionics"

DOI: 10.1016/j.ssi.2017.03.011

Abstract: Abstract BITAVOX (Bi2TaxV1 − xO5.5) thin films with different thicknesses or compositions were deposited from Bi, Ta and V targets by reactive magnetron co-sputtering. As-deposited films are amorphous and have to be thermally treated at 700 °C for… read more here.

Keywords: magnetron sputtering; coatings obtained; reactive magnetron; thickness ... See more keywords