Anodic bondable Li-Na-Al-B-Si-O glass-ceramics for Si - ULTCC heterogeneous integration
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DOI: 10.1016/j.jeurceramsoc.2019.02.028
Abstract: In this paper, we report an anodic bondable Li-Na-Al-B-Si-O (LNABS) glass-ceramic system with a low ternperautre (150 degrees C) and voltage (200 V) for Si - ULTCC (Ultra-Low Temperature Co-fired Ceramics) heterougeneous integration. The ULTCC… read more here.
Keywords: anodic bondable; integration; bondable glass; temperature ... See more keywords