Effects of argon plasma pretreatment of Si wafers on Si-Si bonding based on Mo/Au interlayers
Sign Up to like & getrecommendations! Published in 2023 at "Surface Topography: Metrology and Properties"
DOI: 10.1088/2051-672x/acd569
Abstract: To improve the bonding quality of Si-Si wafers bonded based on Mo/Au intermediate layers at room temperature, the surfaces of Si wafers were pretreated with argon plasma, and the effect of argon plasma pretreatment on… read more here.
Keywords: argon plasma; surface; plasma pretreatment; plasma ... See more keywords