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Published in 2017 at "Microsystem Technologies"
DOI: 10.1007/s00542-016-2982-4
Abstract: Nowadays, wafer bonding is becoming a key enabling technology for three-dimensional (3D) packaging, micro-electro-mechanical systems (MEMS) encapsulation and heterogeneous integration. This paper develops and investigates entire Si wafer bonding based on thin Al and Sn…
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Keywords:
silicon wafer;
bonding utilizing;
investigations silicon;
wafer bonding ... See more keywords
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Published in 2017 at "Journal of Thermal Spray Technology"
DOI: 10.1007/s11666-017-0633-7
Abstract: Interlamellar bonding within plasma-sprayed coatings is one of the most important factors dominating the properties and performance of coatings. The interface bonding between lamellae significantly influences the erosion behavior of plasma-sprayed ceramic coatings. In this…
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Keywords:
temperature;
bonding;
erosion;
ceramic coatings ... See more keywords
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Published in 2018 at "Applied Surface Science"
DOI: 10.1016/j.apsusc.2018.03.076
Abstract: Abstract To lower the Cu-Cu bonding temperature and save the time of the bonding process applied for 3D integration, the Ag nanostructure deposited by pulsed laser deposition (PLD) was designed and decorated on the Cu…
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Keywords:
laser deposition;
bonding temperature;
temperature;
nanostructure ... See more keywords
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Published in 2023 at "ACS Applied Materials & Interfaces"
DOI: 10.1021/acsami.2c21229
Abstract: Semiconductor packaging continues to reduce in thickness following the overall thinning of electronic devices such as smartphones and tablets. As the package becomes thinner, the warpage of the semiconductor package becomes more important due to…
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Keywords:
packaging;
modified cure;
cure;
package ... See more keywords
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Published in 2017 at "Isij International"
DOI: 10.2355/isijinternational.isijint-2016-693
Abstract: To produce a fine, precise structure required in microelectronic-mechanical systems (MEMS), various methods have been proposed that depend on the type of material used. A recently developed production method of metal MEMS is diffusion bonding…
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Keywords:
temperature;
austenitic stainless;
stainless steel;
bonding temperature ... See more keywords
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Published in 2020 at "International Journal of Materials Research"
DOI: 10.3139/146.111902
Abstract: Abstract The objective of this study is to investigate the effect of bonding temperature on the microstructure and mechanical properties of Al2024 and Ti-6Al-4V diffusion bonds using a 30 μm pure silver foil as interlayer.…
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Keywords:
temperature;
microscopy;
al2024 6al;
effect joining ... See more keywords