Articles with "borate precursor" as a keyword



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Thermodynamic Analysis of the Behavior of Trimethyl Borate as a Precursor for Chemical Vapor Deposition of Boron-Containing Films

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Published in 2018 at "Russian Journal of Inorganic Chemistry"

DOI: 10.1134/s0036023618060153

Abstract: The chemical vapor deposition (CVD) of boron-containing films involving the trimethyl borate precursor has been modeled in the ranges of pressures 0.03 ≤ Р, Torr ≤ 760 and temperatures 300 ≤ Т, K ≤ 2000.… read more here.

Keywords: containing films; chemical vapor; borate precursor; vapor deposition ... See more keywords