Synthesis of boron-containing coatings through planar magnetron sputtering of boron targets
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DOI: 10.1016/j.vacuum.2018.05.047
Abstract: Abstract The paper demonstrates the possibility to synthesize boron-containing coatings through magnetron sputtering of crystalline boron targets at a frequency of several hundred kilohertz, which is much lower compared to rf magnetrons, and presents research… read more here.
Keywords: boron targets; magnetron sputtering; containing coatings; boron ... See more keywords